Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735441 | Systems and methods for improved semiconductor etching and component protection | Tien Fak Tan, Lok Kee Loh, Dmitry Lubomirsky, Martin Yue Choy, Soonam Park | 2023-08-22 |
| 11587765 | Plasma ignition optimization in semiconductor processing chambers | Kenneth D. Schatz | 2023-02-21 |