Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11834744 | Ceramic showerheads with conductive electrodes | Laksheswar Kalita, Soonam Park, Dmitry Lubomirsky, LokKee Loh, Saravjeet Singh +1 more | 2023-12-05 |
| 11735441 | Systems and methods for improved semiconductor etching and component protection | Lok Kee Loh, Dmitry Lubomirsky, Soonwook Jung, Martin Yue Choy, Soonam Park | 2023-08-22 |
| 11591693 | Ceramic showerheads with conductive electrodes | Laksheswar Kalita, Soonam Park, Dmitry Lubomirsky, LokKee Loh, Saravjeet Singh +1 more | 2023-02-28 |