Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11557464 | Semiconductor chamber coatings and processes | Laksheswar Kalita, Dmitry Lubomirsky, Kenneth D. Schatz | 2023-01-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11557464 | Semiconductor chamber coatings and processes | Laksheswar Kalita, Dmitry Lubomirsky, Kenneth D. Schatz | 2023-01-17 |