Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11856706 | Method and system for improving the operation of semiconductor processing | Hsui Yang, Yao-Hung YANG, Jeevan Shanbhag, Chien-Min Liao, Earl Hunter +4 more | 2023-12-26 |
| 11680308 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor | 2023-06-20 |
| 11566317 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |
| 11566318 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |
| 11566319 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |
| 11560913 | Brazed joint and semiconductor processing chamber component having the same | Govinda Raj, Hamid Mohiuddin, Ian Widlow | 2023-01-24 |