Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11761901 | Apparatus and method for inspecting lamps | Vilen K. NESTOROV | 2023-09-19 |
| 11694879 | Component, method of manufacturing the component, and method of cleaning the component | Ian Widlow, Gary Urban Keppers, Aravind Dugganna Naik, Francisco Rodarte, Sudhir Gondhalekar +1 more | 2023-07-04 |
| 11676802 | Substrate support with real time force and film stress control | Wendell Glenn Boyd, Jr., Matthew J. Busche | 2023-06-13 |
| 11569069 | 3D printed chamber components configured for lower film stress and lower operating temperature | Kadthala Ramaya Narendrnath, Goichi Yoshidome, Bopanna Ichettira VASANTHA, Umesh M. Kelkar | 2023-01-31 |
| 11560913 | Brazed joint and semiconductor processing chamber component having the same | Tom K. Cho, Hamid Mohiuddin, Ian Widlow | 2023-01-24 |