Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11826875 | Window in thin polishing pad | Yongqi Hu, Thomas Lawrence Terry | 2023-11-28 |
| 11738421 | Method of making carrier head membrane with regions of different roughness | Young J. Paik, Ashish Bhatnagar | 2023-08-29 |
| 11569069 | 3D printed chamber components configured for lower film stress and lower operating temperature | Govinda Raj, Goichi Yoshidome, Bopanna Ichettira VASANTHA, Umesh M. Kelkar | 2023-01-31 |