Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658016 | Shield for a substrate processing chamber | Kathleen Scheible, Michael Allen Flanigan, Adolph Miller Allen, Cristopher M. Pavloff | 2023-05-23 |
| 11569069 | 3D printed chamber components configured for lower film stress and lower operating temperature | Kadthala Ramaya Narendrnath, Govinda Raj, Bopanna Ichettira VASANTHA, Umesh M. Kelkar | 2023-01-31 |