Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658016 | Shield for a substrate processing chamber | Michael Allen Flanigan, Goichi Yoshidome, Adolph Miller Allen, Cristopher M. Pavloff | 2023-05-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658016 | Shield for a substrate processing chamber | Michael Allen Flanigan, Goichi Yoshidome, Adolph Miller Allen, Cristopher M. Pavloff | 2023-05-23 |