Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835927 | Reducing substrate surface scratching using machine learning | Kartik Shah, Satish Radhakrishnan, Karthik Ramanathan, Karthikeyan Balaraman, Xinyuan Chong +5 more | 2023-12-05 |
| 11810770 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more | 2023-11-07 |
| 11658016 | Shield for a substrate processing chamber | Kathleen Scheible, Michael Allen Flanigan, Goichi Yoshidome, Cristopher M. Pavloff | 2023-05-23 |
| 11586160 | Reducing substrate surface scratching using machine learning | Kartik Shah, Satish Radhakrishnan, Karthik Ramanathan, Karthikeyan Balaraman, Xinyuan Chong +5 more | 2023-02-21 |