Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810770 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Fuhong Zhang, Martin Lee Riker, Keith A. Miller, William Fruchterman +4 more | 2023-11-07 |
| 11776805 | Selective oxidation and simplified pre-clean | Bencherki Mebarki, Yi Xu, Yu Lei, Xianmin Tang, Kelvin Chan +2 more | 2023-10-03 |
| 11587936 | Low resistivity DRAM buried word line stack | Yixiong Yang, Jacqueline S. Wrench, Yong Yang, Srinivas Gandikota, Annamalai Lakshmanan +2 more | 2023-02-21 |
| 11562925 | Method of depositing multilayer stack including copper over features of a device structure | Shirish A. PETHE, Fuhong Zhang, Rui Li, Xiangjin Xie, Xianmin Tang | 2023-01-24 |