Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810770 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Keith A. Miller, William Fruchterman +4 more | 2023-11-07 |
| D998575 | Collimator for use in a physical vapor deposition (PVD) chamber | Fuhong Zhang, Lanlan Zhong, Kishor Kalathiparambil | 2023-09-12 |
| D997111 | Collimator for use in a physical vapor deposition (PVD) chamber | Fuhong Zhang, Lanlan Zhong, Kishor Kalathiparambil | 2023-08-29 |
| 11692262 | EM source for enhanced plasma control | Alexander Jansen, Keith A. Miller, Prashanth Kothnur, David Gunther, Emily Schooley | 2023-07-04 |