Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846013 | Methods and apparatus for extended chamber for through silicon via deposition | Jiao Song, Kirankumar Neelasandra SAVANDAIAH, Irena H. Wysok, Anthony Chih-Tung Chan | 2023-12-19 |
| D1007449 | Target profile for a physical vapor deposition chamber target | Kirankumar Neelasandra SAVANDAIAH, Jiao Song, Madan Kumar Shimoga Mylarappa, Yue Cui, Nuno Yen-Chu Chen +1 more | 2023-12-12 |
| 11692262 | EM source for enhanced plasma control | Alexander Jansen, Keith A. Miller, Prashanth Kothnur, Martin Lee Riker, Emily Schooley | 2023-07-04 |
| 11581166 | Low profile deposition ring for enhanced life | Kirankumar Neelasandra SAVANDAIAH, Jiao Song, Irena H. Wysok, Anthony Chih-Tung Chan | 2023-02-14 |
| 11581167 | Process kit having tall deposition ring and smaller diameter electrostatic chuck (ESC) for PVD chamber | Siew Kit Hoi, Kirankumar Neelasandra SAVANDAIAH | 2023-02-14 |