Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846013 | Methods and apparatus for extended chamber for through silicon via deposition | David Gunther, Kirankumar Neelasandra SAVANDAIAH, Irena H. Wysok, Anthony Chih-Tung Chan | 2023-12-19 |
| D1007449 | Target profile for a physical vapor deposition chamber target | David Gunther, Kirankumar Neelasandra SAVANDAIAH, Madan Kumar Shimoga Mylarappa, Yue Cui, Nuno Yen-Chu Chen +1 more | 2023-12-12 |
| 11784033 | Methods and apparatus for processing a substrate | Mengxue Wu, Siew Kit Hoi, Jay Min Soh, Yue Cui, Chul Nyoung Lee +1 more | 2023-10-10 |
| 11581166 | Low profile deposition ring for enhanced life | Kirankumar Neelasandra SAVANDAIAH, David Gunther, Irena H. Wysok, Anthony Chih-Tung Chan | 2023-02-14 |