Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846013 | Methods and apparatus for extended chamber for through silicon via deposition | David Gunther, Jiao Song, Kirankumar Neelasandra SAVANDAIAH, Anthony Chih-Tung Chan | 2023-12-19 |
| 11581166 | Low profile deposition ring for enhanced life | Kirankumar Neelasandra SAVANDAIAH, Jiao Song, David Gunther, Anthony Chih-Tung Chan | 2023-02-14 |