Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810770 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, William Fruchterman +4 more | 2023-11-07 |
| 11692262 | EM source for enhanced plasma control | Alexander Jansen, Prashanth Kothnur, Martin Lee Riker, David Gunther, Emily Schooley | 2023-07-04 |
| 11676801 | Methods and apparatus for processing a substrate | Tiefeng Shi, Gang Fu | 2023-06-13 |
| 11670493 | Isolator ring clamp and physical vapor deposition chamber incorporating same | Ilya Lavitsky | 2023-06-06 |
| 11661651 | Methods and apparatus for passivating a target | Chao Du, Xing CHEN, Jothilingam Ramalingam, Jianxin Lei | 2023-05-30 |
| 11618943 | PVD target having self-retained low friction pads | Ilya Lavitsky | 2023-04-04 |