Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842890 | Methods and apparatus for physical vapor deposition (PVD) dielectric deposition | William Fruchterman | 2023-12-12 |
| 11661651 | Methods and apparatus for passivating a target | Chao Du, Xing CHEN, Keith A. Miller, Jianxin Lei | 2023-05-30 |
| 11655534 | Apparatus for reducing tungsten resistivity | Wenting Hou, Jianxin Lei, Prashanth Kothnur, William Johanson | 2023-05-23 |
| 11572618 | Method and chamber for backside physical vapor deposition | Xiaozhou Che, Yong Cao, Shane Lavan, Chunming Zhou | 2023-02-07 |
| 11550222 | Dose reduction of patterned metal oxide photoresists | Tejinder Singh, Lifan Yan, Abhijit Basu Mallick, Daniel Lee Diehl, Ho-yung David Hwang | 2023-01-10 |