Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11721566 | Sensor assembly and methods of vapor monitoring in process chambers | Graeme Scott, Richard Hagborg, Alan Ouye, Nelson Yee | 2023-08-08 |
| 11572618 | Method and chamber for backside physical vapor deposition | Jothilingam Ramalingam, Yong Cao, Shane Lavan, Chunming Zhou | 2023-02-07 |