Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11678589 | Method of making high critical temperature metal nitride layer | Zihao Yang, Mingwei Zhu, Shriram Mangipudi, Mohammad Kamruzzaman Chowdhury, Zhebo Chen +2 more | 2023-06-13 |
| 11600477 | Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD process | Kirankumar Neelasandra SAVANDAIAH, Sundarapandian Ramalinga Vijayalakshmi REDDY, Randal Dean Schmieding, Yong Cao | 2023-03-07 |
| 11600761 | High critical temperature metal nitride layer with oxide or oxynitride seed layer | Zihao Yang, Mingwei Zhu, Shriram Mangipudi, Mohammad Kamruzzaman Chowdhury, Zhebo Chen +2 more | 2023-03-07 |
| 11572618 | Method and chamber for backside physical vapor deposition | Jothilingam Ramalingam, Xiaozhou Che, Yong Cao, Chunming Zhou | 2023-02-07 |