Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11834743 | Segmented showerhead for uniform delivery of multiple precursors | Alexander Lerner, Roey Shaviv, Satish Radhakrishnan | 2023-12-05 |
| 11692262 | EM source for enhanced plasma control | Alexander Jansen, Keith A. Miller, Martin Lee Riker, David Gunther, Emily Schooley | 2023-07-04 |
| 11655534 | Apparatus for reducing tungsten resistivity | Wenting Hou, Jianxin Lei, Jothilingam Ramalingam, William Johanson | 2023-05-23 |
| 11600476 | Deposition system with multi-cathode and method of manufacture thereof | Anantha K. Subramani, Deepak Jadhav, Ashish Goel, Hanbing Wu, Chi Hong Ching | 2023-03-07 |