Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11834743 | Segmented showerhead for uniform delivery of multiple precursors | Alexander Lerner, Prashanth Kothnur, Satish Radhakrishnan | 2023-12-05 |
| 11692261 | Evaporator chamber for forming films on substrates | Alexander Lerner, Satish Radhakrishnan | 2023-07-04 |
| 11637004 | Alignment module with a cleaning chamber | Alexander Lerner, Michael P. Karazim, Andrew J. Constant, Jeffrey A. Brodine, Kim Vellore +1 more | 2023-04-25 |