Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11802340 | UHV in-situ cryo-cool chamber | Bharath Swaminathan, John Mazzocco, Ashish Goel, Anantha K. Subramani | 2023-10-31 |
| 11600476 | Deposition system with multi-cathode and method of manufacture thereof | Anantha K. Subramani, Deepak Jadhav, Ashish Goel, Prashanth Kothnur, Chi Hong Ching | 2023-03-07 |