Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830710 | Internally divisible process chamber using a shutter disk assembly | Anantha K. Subramani, Yang Guo | 2023-11-28 |
| 11802340 | UHV in-situ cryo-cool chamber | Bharath Swaminathan, Hanbing Wu, Ashish Goel, Anantha K. Subramani | 2023-10-31 |
| 11545347 | Internally divisible process chamber using a shutter disk assembly | Anantha K. Subramani, Yang Guo | 2023-01-03 |