Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830710 | Internally divisible process chamber using a shutter disk assembly | John Mazzocco, Yang Guo | 2023-11-28 |
| 11823871 | Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool | Jozef Kudela, Tsutomu Tanaka, Alexander V. Garachtchenko, Dmitry A. Dzilno, Avinash Shervegar +3 more | 2023-11-21 |
| 11802340 | UHV in-situ cryo-cool chamber | Bharath Swaminathan, John Mazzocco, Hanbing Wu, Ashish Goel | 2023-10-31 |
| 11600476 | Deposition system with multi-cathode and method of manufacture thereof | Deepak Jadhav, Ashish Goel, Hanbing Wu, Prashanth Kothnur, Chi Hong Ching | 2023-03-07 |
| 11575071 | Oxygen controlled PVD ALN buffer for GAN-based optoelectronic and electronic devices | Mingwei Zhu, Nag B. Patibandla, Rongjun Wang, Daniel Lee Diehl, Vivek Agrawal | 2023-02-07 |
| 11551905 | Resonant process monitor | Yaoling Pan, Vijaykumar Krithivasan, Shimin Mao, Kelvin Chan, Michael D. Willwerth +5 more | 2023-01-10 |
| 11545347 | Internally divisible process chamber using a shutter disk assembly | John Mazzocco, Yang Guo | 2023-01-03 |