Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11551905 | Resonant process monitor | Yaoling Pan, Shimin Mao, Kelvin Chan, Michael D. Willwerth, Anantha K. Subramani +5 more | 2023-01-10 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11551905 | Resonant process monitor | Yaoling Pan, Shimin Mao, Kelvin Chan, Michael D. Willwerth, Anantha K. Subramani +5 more | 2023-01-10 |