Issued Patents 2023
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817320 | CVD based oxide-metal multi structure for 3D NAND memory devices | Susmit Singha Roy, Hien Minh Le, Sanjay Kamath, Abhijit Basu Mallick, Srinivas Gandikota +1 more | 2023-11-14 |
| 11776805 | Selective oxidation and simplified pre-clean | Bencherki Mebarki, Joung Joo Lee, Yi Xu, Yu Lei, Xianmin Tang +2 more | 2023-10-03 |
| 11749564 | Techniques for void-free material depositions | M. Arif Zeeshan, Shantanu Kallakuri, Sony Varghese, John Hautala | 2023-09-05 |
| 11702742 | Methods of forming nucleation layers with halogenated silanes | Yihong Chen | 2023-07-18 |
| 11621160 | Doped and undoped vanadium oxides for low-k spacer applications | Eswaranand Venkatasubramanian, Srinivas Gandikota, Atashi Basu, Abhijit Basu Mallick | 2023-04-04 |
| 11562904 | Deposition of semiconductor integration films | Lakmal C. Kalutarage, Mark Saly, Bhaskar Jyoti Bhuyan, Thomas Knisley, Regina Freed +3 more | 2023-01-24 |
| 11562902 | Hydrogen management in plasma deposited films | Rui Cheng, Diwakar Kedlaya, Karthik Janakiraman, Gautam K. Hemani, Krishna Nittala +4 more | 2023-01-24 |
| 11551905 | Resonant process monitor | Yaoling Pan, Vijaykumar Krithivasan, Shimin Mao, Michael D. Willwerth, Anantha K. Subramani +5 more | 2023-01-10 |