Issued Patents 2023
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830706 | Heated pedestal design for improved heat transfer and temperature uniformity | Venkata Sharat Chandra Parimi, Zubin Huang, Jian Li, Satish Radhakrishnan, Rui Cheng +7 more | 2023-11-28 |
| 11827514 | Amorphous silicon-based films resistant to crystallization | Aykut Aydin, Krishna Nittala, Yi Yang, Gautam K. Hemani | 2023-11-28 |
| 11817320 | CVD based oxide-metal multi structure for 3D NAND memory devices | Susmit Singha Roy, Kelvin Chan, Hien Minh Le, Sanjay Kamath, Abhijit Basu Mallick +1 more | 2023-11-14 |
| 11798820 | Gas delivery systems and methods | Diwakar Kedlaya, Fang Ruan, Zubin Huang, Ganesh Balasubramanian, Kaushik Alayavalli +3 more | 2023-10-24 |
| 11791136 | Deposition radial and edge profile tunability through independent control of TEOS flow | Sanjeev Baluja, Yi Yang, Truong Van Nguyen, Nattaworn Boss Nunta, Joseph AuBuchon +1 more | 2023-10-17 |
| 11699577 | Treatment for high-temperature cleans | Sarah Michelle Bobek, Ruiyun Huang, Abdul Aziz Khaja, Amit Kumar BANSAL, Dong-Hyung LEE +6 more | 2023-07-11 |
| 11699585 | Methods of forming hardmasks | Jui-Yuan Hsu, Pramit Manna, Bhaskar Kumar | 2023-07-11 |
| 11694902 | Methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers | Krishna Nittala, Sarah Michelle Bobek, Kwangduk Douglas Lee, Ratsamee Limdulpaiboon, Dimitri Kioussis | 2023-07-04 |
| 11676813 | Doping semiconductor films | Aykut Aydin, Rui Cheng, Yi Yang, Krishna Nittala, Bo Qi +1 more | 2023-06-13 |
| 11664226 | Methods for producing high-density carbon films for hardmasks and other patterning applications | Jui-Yuan Hsu, Pramit Manna | 2023-05-30 |
| 11664214 | Methods for producing high-density, nitrogen-doped carbon films for hardmasks and other patterning applications | Jui-Yuan Hsu, Pramit Manna | 2023-05-30 |
| 11640905 | Plasma enhanced deposition of silicon-containing films at low temperature | Aykut Aydin, Rui Cheng | 2023-05-02 |
| 11618949 | Methods to reduce material surface roughness | Yi Yang, Krishna Nittala, Aykut Aydin, Diwakar Kedlaya | 2023-04-04 |
| 11562902 | Hydrogen management in plasma deposited films | Rui Cheng, Diwakar Kedlaya, Gautam K. Hemani, Krishna Nittala, Alicia J. Lustgraaf +4 more | 2023-01-24 |