Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827514 | Amorphous silicon-based films resistant to crystallization | Krishna Nittala, Karthik Janakiraman, Yi Yang, Gautam K. Hemani | 2023-11-28 |
| 11676813 | Doping semiconductor films | Rui Cheng, Yi Yang, Krishna Nittala, Karthik Janakiraman, Bo Qi +1 more | 2023-06-13 |
| 11640905 | Plasma enhanced deposition of silicon-containing films at low temperature | Rui Cheng, Karthik Janakiraman | 2023-05-02 |
| 11618949 | Methods to reduce material surface roughness | Yi Yang, Krishna Nittala, Karthik Janakiraman, Diwakar Kedlaya | 2023-04-04 |