Issued Patents 2023
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830729 | Low-k boron carbonitride films | Zeqing Shen, Abhijit Basu Mallick, Nitin K. Ingle | 2023-11-28 |
| 11791155 | Diffusion barriers for germanium | Huiyuan Wang, Susmit Singha Roy, Takehito Koshizawa, Abhijit Basu Mallick, Nitin K. Ingle | 2023-10-17 |
| 11791068 | Post insulator and direct current power transmission device | Licheng LU, Faqiang Yan, Zhiyi Chong, Chengrong Li, Zhijun Guo +2 more | 2023-10-17 |
| 11781218 | Defect free germanium oxide gap fill | Huiyuan Wang, Susmit Singha Roy, Takehito Koshizawa, Abhijit Basu Mallick | 2023-10-10 |
| 11732352 | Hydrogen free silicon dioxide | Zeqing Shen, Abhijit Basu Mallick, Nitin K. Ingle | 2023-08-22 |
| 11702751 | Non-conformal high selectivity film for etch critical dimension control | Huiyuan Wang, Yingli Rao, Abhijit Basu Mallick | 2023-07-18 |
| 11682554 | Catalytic thermal deposition of carbon-containing materials | Zeqing Shen, Abhijit Basu Mallick | 2023-06-20 |
| 11676813 | Doping semiconductor films | Aykut Aydin, Rui Cheng, Yi Yang, Krishna Nittala, Karthik Janakiraman +1 more | 2023-06-13 |
| 11658026 | Conformal silicon oxide film deposition | Zeqing Shen, Abhijit Basu Mallick | 2023-05-23 |
| 11655537 | HDP sacrificial carbon gapfill | Zeqing Shen, Abhijit Basu Mallick | 2023-05-23 |
| 11626278 | Catalytic formation of boron and carbon films | Zeqing Shen, Abhijit Basu Mallick | 2023-04-11 |
| 11545354 | Molecular layer deposition method and system | Bhaskar Jyoti Bhuyan, Zeqing Shen, Abhijit Basu Mallick, Xinke Wang, Mark Saly | 2023-01-03 |