| 11830729 |
Low-k boron carbonitride films |
Zeqing Shen, Abhijit Basu Mallick, Nitin K. Ingle |
2023-11-28 |
| 11791155 |
Diffusion barriers for germanium |
Huiyuan Wang, Susmit Singha Roy, Takehito Koshizawa, Abhijit Basu Mallick, Nitin K. Ingle |
2023-10-17 |
| 11791068 |
Post insulator and direct current power transmission device |
Licheng LU, Faqiang Yan, Zhiyi Chong, Chengrong Li, Zhijun Guo +2 more |
2023-10-17 |
| 11781218 |
Defect free germanium oxide gap fill |
Huiyuan Wang, Susmit Singha Roy, Takehito Koshizawa, Abhijit Basu Mallick |
2023-10-10 |
| 11732352 |
Hydrogen free silicon dioxide |
Zeqing Shen, Abhijit Basu Mallick, Nitin K. Ingle |
2023-08-22 |
| 11702751 |
Non-conformal high selectivity film for etch critical dimension control |
Huiyuan Wang, Yingli Rao, Abhijit Basu Mallick |
2023-07-18 |
| 11682554 |
Catalytic thermal deposition of carbon-containing materials |
Zeqing Shen, Abhijit Basu Mallick |
2023-06-20 |
| 11676813 |
Doping semiconductor films |
Aykut Aydin, Rui Cheng, Yi Yang, Krishna Nittala, Karthik Janakiraman +1 more |
2023-06-13 |
| 11658026 |
Conformal silicon oxide film deposition |
Zeqing Shen, Abhijit Basu Mallick |
2023-05-23 |
| 11655537 |
HDP sacrificial carbon gapfill |
Zeqing Shen, Abhijit Basu Mallick |
2023-05-23 |
| 11626278 |
Catalytic formation of boron and carbon films |
Zeqing Shen, Abhijit Basu Mallick |
2023-04-11 |
| 11545354 |
Molecular layer deposition method and system |
Bhaskar Jyoti Bhuyan, Zeqing Shen, Abhijit Basu Mallick, Xinke Wang, Mark Saly |
2023-01-03 |
