| 11830729 |
Low-k boron carbonitride films |
Bo Qi, Abhijit Basu Mallick, Nitin K. Ingle |
2023-11-28 |
| 11756785 |
Molecular layer deposition contact landing protection for 3D NAND |
Bhaskar Jyoti Bhuyan, Susmit Singha Roy, Abhijit Basu Mallick |
2023-09-12 |
| 11732352 |
Hydrogen free silicon dioxide |
Bo Qi, Abhijit Basu Mallick, Nitin K. Ingle |
2023-08-22 |
| 11682554 |
Catalytic thermal deposition of carbon-containing materials |
Bo Qi, Abhijit Basu Mallick |
2023-06-20 |
| 11658026 |
Conformal silicon oxide film deposition |
Bo Qi, Abhijit Basu Mallick |
2023-05-23 |
| 11655537 |
HDP sacrificial carbon gapfill |
Bo Qi, Abhijit Basu Mallick |
2023-05-23 |
| 11626278 |
Catalytic formation of boron and carbon films |
Bo Qi, Abhijit Basu Mallick |
2023-04-11 |
| 11545354 |
Molecular layer deposition method and system |
Bhaskar Jyoti Bhuyan, Bo Qi, Abhijit Basu Mallick, Xinke Wang, Mark Saly |
2023-01-03 |
