Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827514 | Amorphous silicon-based films resistant to crystallization | Aykut Aydin, Karthik Janakiraman, Yi Yang, Gautam K. Hemani | 2023-11-28 |
| 11721545 | Method of using dual frequency RF power in a process chamber | Anup K. Singh, Rick Kustra, Vinayak Vishwanath Hassan, Bhaskar Kumar, Pramit Manna +2 more | 2023-08-08 |
| 11694902 | Methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers | Sarah Michelle Bobek, Kwangduk Douglas Lee, Ratsamee Limdulpaiboon, Dimitri Kioussis, Karthik Janakiraman | 2023-07-04 |
| 11676813 | Doping semiconductor films | Aykut Aydin, Rui Cheng, Yi Yang, Karthik Janakiraman, Bo Qi +1 more | 2023-06-13 |
| 11618949 | Methods to reduce material surface roughness | Yi Yang, Karthik Janakiraman, Aykut Aydin, Diwakar Kedlaya | 2023-04-04 |
| 11562902 | Hydrogen management in plasma deposited films | Rui Cheng, Diwakar Kedlaya, Karthik Janakiraman, Gautam K. Hemani, Alicia J. Lustgraaf +4 more | 2023-01-24 |