Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11694902 | Methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers | Krishna Nittala, Sarah Michelle Bobek, Kwangduk Douglas Lee, Ratsamee Limdulpaiboon, Karthik Janakiraman | 2023-07-04 |
| 11581165 | Multi-zone gas distribution systems and methods | Saravjeet Singh, Kenneth D. Schatz, Alan Tso, Marlin Wijekoon | 2023-02-14 |