Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11637002 | Methods and systems to enhance process uniformity | Saravjeet Singh, Jingchun Zhang, Zihui Li, Hanshen Zhang, Dmitry Lubomirsky | 2023-04-25 |
| 11609505 | Apparatus and methods for verification and re-use of process fluids | Mangesh Ashok BANGAR, Gautam Pisharody, Lancelot HUANG, Douglas A. Buchberger, Jr., Huixiong Dai +3 more | 2023-03-21 |
| 11581165 | Multi-zone gas distribution systems and methods | Saravjeet Singh, Kenneth D. Schatz, Marlin Wijekoon, Dimitri Kioussis | 2023-02-14 |