Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815816 | Apparatus for post exposure bake of photoresist | Dmitry Lubomirsky, John O. Dukovic, Srinivas D. Nemani | 2023-11-14 |
| 11631591 | Methods for depositing dielectric material | Bhargav S. Citla, Jethro Tannos, Jingyi Li, Zhong Qiang Hua, Srinivas D. Nemani +1 more | 2023-04-18 |
| 11609505 | Apparatus and methods for verification and re-use of process fluids | Mangesh Ashok BANGAR, Gautam Pisharody, Lancelot HUANG, Alan Tso, Huixiong Dai +3 more | 2023-03-21 |
| 11555730 | In-situ method and apparatus for measuring fluid resistivity | Gautam Pisharody, Lancelot HUANG | 2023-01-17 |