Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798606 | Additive patterning of semiconductor film stacks | John O. Dukovic, Srinivas D. Nemani, Ellie Yieh, Praburam Gopalraja, Steven Hiloong WELCH | 2023-10-24 |
| 11631591 | Methods for depositing dielectric material | Jethro Tannos, Jingyi Li, Douglas A. Buchberger, Jr., Zhong Qiang Hua, Srinivas D. Nemani +1 more | 2023-04-18 |
| 11581183 | Methods of forming amorphous carbon hard mask layers and hard mask layers formed therefrom | Mei-Yee Shek, Srinivas D. Nemani | 2023-02-14 |
| 11566325 | Silicon carbonitride gapfill with tunable carbon content | Mei-Yee Shek, Joshua Rubnitz, Jethro Tannos, Chentsau Chris Ying, Srinivas D. Nemani +1 more | 2023-01-31 |