Issued Patents 2023
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798606 | Additive patterning of semiconductor film stacks | John O. Dukovic, Srinivas D. Nemani, Praburam Gopalraja, Steven Hiloong WELCH, Bhargav S. Citla | 2023-10-24 |
| 11764058 | Three-color 3D DRAM stack and methods of making | Arvind Kumar, Mahendra Pakala, John Tolle, Thomas Kirschenheiter, Anchuan Wang +1 more | 2023-09-19 |
| 11756803 | Gas delivery system for high pressure processing chamber | Qiwei Liang, Srinivas D. Nemani, Sean S. Kang, Adib Khan | 2023-09-12 |
| 11756828 | Cluster processing system for forming a transition metal material | Keith Tatseun Wong, Srinivas D. Nemani | 2023-09-12 |
| 11705337 | Tungsten defluorination by high pressure treatment | Keith Tatseun Wong, Thomas Jongwan Kwon, Sean S. Kang | 2023-07-18 |
| 11682556 | Methods of improving graphene deposition for processes using microwave surface-wave plasma on dielectric materials | Jie Zhou, Erica Chen, Qiwei Liang, Chentsau Chris Ying, Srinivas D. Nemani | 2023-06-20 |
| 11650506 | Film structure for electric field guided photoresist patterning process | Huixiong Dai, Mangesh Ashok BANGAR, Christopher S. Ngai, Srinivas D. Nemani, Steven Hiloong WELCH | 2023-05-16 |
| 11631591 | Methods for depositing dielectric material | Bhargav S. Citla, Jethro Tannos, Jingyi Li, Douglas A. Buchberger, Jr., Zhong Qiang Hua +1 more | 2023-04-18 |
| 11566325 | Silicon carbonitride gapfill with tunable carbon content | Mei-Yee Shek, Bhargav S. Citla, Joshua Rubnitz, Jethro Tannos, Chentsau Chris Ying +1 more | 2023-01-31 |