Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11756803 | Gas delivery system for high pressure processing chamber | Qiwei Liang, Srinivas D. Nemani, Sean S. Kang, Ellie Yieh | 2023-09-12 |
| 11749555 | Semiconductor processing system | Sultan Malik, Srinivas D. Nemani, Qiwei Liang | 2023-09-05 |
| 11725274 | Integrated cluster tool for selective area deposition | Tobin Kaufman-Osborn, Srinivas D. Nemani, Ludovic Godet, Qiwei Liang | 2023-08-15 |