Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821085 | Methods of selective atomic layer deposition | Bhaskar Jyoti Bhuyan, Mark Saly, David Thompson, Kurt Fredrickson, Thomas Knisley +1 more | 2023-11-21 |
| 11732355 | Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber | Vishwas Kumar Pandey, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra +2 more | 2023-08-22 |
| 11735420 | Wafer treatment for achieving defect-free self-assembled monolayers | Chang Ke, Lei Zhou, Biao Liu, Cheng Pan, Yuanhong Guo +5 more | 2023-08-22 |
| 11725274 | Integrated cluster tool for selective area deposition | Srinivas D. Nemani, Ludovic Godet, Qiwei Liang, Adib Khan | 2023-08-15 |
| 11610776 | Method of linearized film oxidation growth | Christopher S. Olsen | 2023-03-21 |