Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854773 | Remote plasma cleaning of chambers for electronics manufacturing systems | Sheng Guo, Marek Radko, Steve Sansoni, Xiaoxiong Yuan, See-Eng Phan +3 more | 2023-12-26 |
| 11735420 | Wafer treatment for achieving defect-free self-assembled monolayers | Chang Ke, Lei Zhou, Biao Liu, Cheng Pan, Liqi Wu +5 more | 2023-08-22 |
| 11555250 | Organic contamination free surface machining | Sheng Guo, Marek Radko, Steven V. Sansoni, Nagendra Madiwal, Matvey Farber +7 more | 2023-01-17 |