Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854773 | Remote plasma cleaning of chambers for electronics manufacturing systems | Yuanhong Guo, Marek Radko, Steve Sansoni, Xiaoxiong Yuan, See-Eng Phan +3 more | 2023-12-26 |
| 11772137 | Reactive cleaning of substrate support | Xi Chen, Shreesha Yogish Rao, Chi Hong Ching, Thomas Brezoczky, Cheng-Hsiung Tsai | 2023-10-03 |
| 11555250 | Organic contamination free surface machining | Yuanhong Guo, Marek Radko, Steven V. Sansoni, Nagendra Madiwal, Matvey Farber +7 more | 2023-01-17 |