Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854773 | Remote plasma cleaning of chambers for electronics manufacturing systems | Yuanhong Guo, Sheng Guo, Marek Radko, Steve Sansoni, See-Eng Phan +3 more | 2023-12-26 |
| 11628456 | Apparatus for increasing flux from an ampoule | Kenric Choi, Daping Yao, Mei Chang | 2023-04-18 |
| 11598003 | Substrate processing chamber having heated showerhead assembly | Faruk Gungor, Dien-Yeh Wu, Joel M. Huston, Mei Chang, Kazuya Daito +4 more | 2023-03-07 |
| 11555244 | High temperature dual chamber showerhead | Pingyan Lei, Dien-Yeh Wu, Jallepally Ravi, Takashi Kuratomi, Manjunatha Koppa +1 more | 2023-01-17 |