Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11807008 | Multifunctional printhead service station with multi-axis motions | Daihua Zhang, Kang Luo, Kenneth S. Ledford, Elsa Massonneau, Alexey Stepanov +5 more | 2023-11-07 |
| 11802791 | Optical device metrology systems and related methods | Jinxin FU, Ludovic Godet | 2023-10-31 |
| 11748875 | See-through metrology systems, apparatus, and methods for optical devices | Yangyang SUN, Jinxin FU, Ludovic Godet | 2023-09-05 |
| 11721542 | Dual plasma pre-clean for selective gap fill | Yi Xu, Yufei Hu, Yu Lei, Dien-Yeh Wu, Jallepally Ravi | 2023-08-08 |
| 11598003 | Substrate processing chamber having heated showerhead assembly | Faruk Gungor, Dien-Yeh Wu, Joel M. Huston, Mei Chang, Xiaoxiong Yuan +4 more | 2023-03-07 |