Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D997893 | Shadow ring lift plate | Zubin Huang, Srinivas Tokur Mohana, Shreyas Patil Shanthaveeraswamy, Sandesh Yadamane, Harpreet Singh +1 more | 2023-09-05 |
| D997894 | Shadow ring lift assembly | Zubin Huang, Srinivas Tokur Mohana, Shreyas Patil Shanthaveeraswamy, Sandesh Yadamane, Harpreet Singh +1 more | 2023-09-05 |
| 11721542 | Dual plasma pre-clean for selective gap fill | Yi Xu, Yufei Hu, Kazuya Daito, Yu Lei, Dien-Yeh Wu | 2023-08-08 |
| 11555244 | High temperature dual chamber showerhead | Pingyan Lei, Dien-Yeh Wu, Takashi Kuratomi, Xiaoxiong Yuan, Manjunatha Koppa +1 more | 2023-01-17 |