Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749543 | Chamber matching and calibration | Xuesong Lu, Yu Lei, Anup Phatak, Hyman Lam, Chong Jiang +1 more | 2023-09-05 |
| 11721542 | Dual plasma pre-clean for selective gap fill | Yi Xu, Kazuya Daito, Yu Lei, Dien-Yeh Wu, Jallepally Ravi | 2023-08-08 |
| 11562909 | Directional selective junction clean with field polymer protections | Yu Lei, Xuesong Lu, Tae Hong Ha, Xianmin Tang, Andrew Nguyen +4 more | 2023-01-24 |