Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776805 | Selective oxidation and simplified pre-clean | Bencherki Mebarki, Joung Joo Lee, Yu Lei, Xianmin Tang, Kelvin Chan +2 more | 2023-10-03 |
| 11776806 | Multi-step pre-clean for selective metal gap fill | Xi Cen, Yakuan Yao, Yiming Lai, Kai Wu, Avgerinos V. Gelatos +8 more | 2023-10-03 |
| 11721542 | Dual plasma pre-clean for selective gap fill | Yufei Hu, Kazuya Daito, Yu Lei, Dien-Yeh Wu, Jallepally Ravi | 2023-08-08 |