Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776806 | Multi-step pre-clean for selective metal gap fill | Xi Cen, Yakuan Yao, Kai Wu, Avgerinos V. Gelatos, David T. Or +8 more | 2023-10-03 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776806 | Multi-step pre-clean for selective metal gap fill | Xi Cen, Yakuan Yao, Kai Wu, Avgerinos V. Gelatos, David T. Or +8 more | 2023-10-03 |