Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798845 | Methods and apparatus for low resistivity and stress tungsten gap fill | Kai Wu, Min Heon, Wei Min Chan, Tom Ho Wing Yu, Peiqi WANG +4 more | 2023-10-24 |
| 11776806 | Multi-step pre-clean for selective metal gap fill | Yakuan Yao, Yiming Lai, Kai Wu, Avgerinos V. Gelatos, David T. Or +8 more | 2023-10-03 |
| 11680312 | Catalyst enhanced seamless ruthenium gap fill | Byunghoon Yoon, Seshadri Ganguli | 2023-06-20 |