Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776806 | Multi-step pre-clean for selective metal gap fill | Xi Cen, Yakuan Yao, Yiming Lai, Kai Wu, David T. Or +8 more | 2023-10-03 |
| 11658014 | Apparatuses and methods of protecting nickel and nickel containing components with thin films | Pingyan Lei, Dien-Yeh Wu, Xiao-Ming He, Jennifer Y. Sun, Lei Zhou +3 more | 2023-05-23 |
| 11598003 | Substrate processing chamber having heated showerhead assembly | Faruk Gungor, Dien-Yeh Wu, Joel M. Huston, Mei Chang, Xiaoxiong Yuan +4 more | 2023-03-07 |