Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11680312 | Catalyst enhanced seamless ruthenium gap fill | Byunghoon Yoon, Xi Cen | 2023-06-20 |
| 11680313 | Selective deposition on non-metallic surfaces | Sang Ho Yu, Lu Chen | 2023-06-20 |
| 11621266 | Method of testing a gap fill for DRAM | Priyadarshi Panda, Sang Ho Yu, Sung-Kwan Kang, Gill Yong Lee, Sanjay Natarajan +2 more | 2023-04-04 |
| 11587936 | Low resistivity DRAM buried word line stack | Yixiong Yang, Jacqueline S. Wrench, Yong Yang, Srinivas Gandikota, Annamalai Lakshmanan +2 more | 2023-02-21 |