Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11751382 | Method of processing dram | Lequn Liu, Jonathan C. Shaw | 2023-09-05 |
| 11709477 | Autonomous substrate processing system | Lei Lian, Pengyu Han, Todd Egan, Prashant Aji, Eli Mor +2 more | 2023-07-25 |
| 11658043 | Selective anisotropic metal etch | Jonathan C. Shaw, Nancy Fung, Yongchang Dong, Somaye Rasouli, Gene Lee | 2023-05-23 |
| 11631680 | Methods and apparatus for smoothing dynamic random access memory bit line metal | In-Seok Hwang | 2023-04-18 |
| 11621266 | Method of testing a gap fill for DRAM | Seshadri Ganguli, Sang Ho Yu, Sung-Kwan Kang, Gill Yong Lee, Sanjay Natarajan +2 more | 2023-04-04 |