Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735401 | In-situ optical chamber surface and process sensor | Chuang-Chia Lin, Upendra Ummethala, Steven E. Babayan | 2023-08-22 |
| 11719952 | Adjustable achromatic collimator assembly for endpoint detection systems | Pengyu Han, John Anthony O'MALLEY, III, Michael N. Grimbergen, Upendra Ummethala, Michael Kutney | 2023-08-08 |
| 11709477 | Autonomous substrate processing system | Priyadarshi Panda, Pengyu Han, Todd Egan, Prashant Aji, Eli Mor +2 more | 2023-07-25 |